The direct measurement of linewidth using an atomic force microscope

被引：0
|
作者：
Yu. A. Novikov
A. V. Rakov
P. A. Todua
机构：
[1] Russian Academy of Sciences,A. M. Prokhorov Institute of General Physics
[2] Research Center for Study of Surface and Vacuum Properties,undefined
来源：
Measurement Techniques | 2008年 / 51卷
关键词：
atomic force microscope; linewidth;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A method for directly measuring linewidth with an atomic force microscope using the first derivative of the signal is presented. The method showed that it is possible to make a direct measurement of the size of the upper base of a trapezoidal protrusion down to 30 nm.
引用
收藏
页码：470 / 474
页数：4
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