Model based correction of placement error in EBL and its verification

被引：0
|
作者：
机构：
[1] Babin, Sergey
[2] Borisov, Sergey
[3] Militsin, Vladimir
[4] Komagata, Tadashi
[5] Wakatsuki, Tetsuro
来源：
| 1600年 / SPIE卷 / 9984期
关键词：
In maskmaking; the main source of error contributing to placement error is charging. DISPLACE software corrects the placement error for any layout; based on a physical model. The charge of a photomask and multiple discharge mechanisms are simulated to find the charge distribution over the mask. The beam deflection is calculated for each location on the mask; creating data for the placement correction. The software considers the mask layout; EBL system setup; resist; and writing order; as well as other factors such as fogging and proximity effects correction. The output of the software is the data for placement correction. One important step is the calibration of physical model. A test layout on a single calibration mask was used for calibration. The extracted model parameters were used to verify the correction. As an ultimate test for the correction; a sophisticated layout was used for the verification that was very different from the calibration mask. The placement correction results were predicted by DISPLACE. A good correlation of the measured and predicted values of the correction confirmed the high accuracy of the charging placement error correction. © 2016 SPIE;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
PSISDG
引用
下载
收藏
相关论文
共 50 条
  • [41] Evolutionary computation-based approach for model error correction and calibration
    Zechman, Emily M.
    Ranjithan, S. Ranji
    ADVANCES IN WATER RESOURCES, 2007, 30 (05) : 1360 - 1370
  • [42] Chinese Grammatical Error Correction Based on Convolutional Sequence to Sequence Model
    Li, Si
    Zhao, Jianbo
    Shi, Guirong
    Tan, Yuanpeng
    Xu, Huifang
    Chen, Guang
    Lan, Haibo
    Lin, Zhiqing
    IEEE ACCESS, 2019, 7 : 72905 - 72913
  • [43] Model-based and empirical evaluation of multimodal interactive error correction
    Suhm, Bernhard
    Myers, Brad
    Waibel, Alex
    Conference on Human Factors in Computing Systems - Proceedings, 1999, : 584 - 591
  • [44] An Orbital Error Correction Model Based on Triplet Network and Shrunken Estimation
    Gao, Zhuang
    He, Xiufeng
    Ma, Zhang-Feng
    Sha, Pengcheng
    Li, Xing
    IEEE GEOSCIENCE AND REMOTE SENSING LETTERS, 2022, 19
  • [45] A Prediction Model Based on Adaptive Selective Scenario Clustering and Error Correction
    Wen, Yuanmei
    Chen, Yanyu
    2016 2ND IEEE INTERNATIONAL CONFERENCE ON COMPUTER AND COMMUNICATIONS (ICCC), 2016, : 670 - 675
  • [46] GRAMMATICAL ERROR CORRECTION BASED ON LEARNER COMPREHENSION MODEL IN ORAL CONVERSATION
    Lee, Kyusong
    Ryu, Seonghan
    Seo, Paul Hongsuck
    Kim, Seokhwan
    Lee, Gary Geunbae
    2014 IEEE WORKSHOP ON SPOKEN LANGUAGE TECHNOLOGY SLT 2014, 2014, : 283 - 287
  • [47] A non-linear error correction mechanism based on the bilinear model
    Peel, D
    Davidson, J
    ECONOMICS LETTERS, 1998, 58 (02) : 165 - 170
  • [48] Robust and Efficient Iris Recognition Based on Sparse Error Correction Model
    Cao, Wei
    Song, Yun
    He, Zunliang
    Zhou, Zhimin
    INTELLIGENT COMPUTING THEORIES, 2013, 7995 : 421 - 426
  • [49] Bootstrapped model learning and error correction for planning with uncertainty in model-based RL
    Ovalle, Alvaro
    Lucas, Simon M.
    2020 IEEE CONFERENCE ON GAMES (IEEE COG 2020), 2020, : 495 - 502
  • [50] Model-based reinforcement learning with model error and its application
    Tajima, Yoshiyuki
    Onisawa, Takehisa
    PROCEEDINGS OF SICE ANNUAL CONFERENCE, VOLS 1-8, 2007, : 1333 - 1336
12345