Model based correction of placement error in EBL and its verification

被引：0
|
作者：
机构：
[1] Babin, Sergey
[2] Borisov, Sergey
[3] Militsin, Vladimir
[4] Komagata, Tadashi
[5] Wakatsuki, Tetsuro
来源：
| 1600年 / SPIE卷 / 9984期
关键词：
In maskmaking; the main source of error contributing to placement error is charging. DISPLACE software corrects the placement error for any layout; based on a physical model. The charge of a photomask and multiple discharge mechanisms are simulated to find the charge distribution over the mask. The beam deflection is calculated for each location on the mask; creating data for the placement correction. The software considers the mask layout; EBL system setup; resist; and writing order; as well as other factors such as fogging and proximity effects correction. The output of the software is the data for placement correction. One important step is the calibration of physical model. A test layout on a single calibration mask was used for calibration. The extracted model parameters were used to verify the correction. As an ultimate test for the correction; a sophisticated layout was used for the verification that was very different from the calibration mask. The placement correction results were predicted by DISPLACE. A good correlation of the measured and predicted values of the correction confirmed the high accuracy of the charging placement error correction. © 2016 SPIE;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
PSISDG
引用
下载
收藏
相关论文
共 50 条
  • [21] Design of a decision error model for reliability of jury evaluation and its experimental verification
    Kim, Eui-Youl
    Shin, Tae Jin
    Lee, Sang-Kwon
    APPLIED ACOUSTICS, 2013, 74 (06) : 789 - 802
  • [22] Research on Chinese Text Error Correction Based on Sequence Model
    Duan, Jianyong
    Yuan, Yang
    Wang, Hao
    Wei, Xiaopeng
    Tan, Zheng
    PROCEEDINGS OF THE 2019 INTERNATIONAL CONFERENCE ON ASIAN LANGUAGE PROCESSING (IALP), 2019, : 154 - 159
  • [23] Price of Electric Futures Forecasting Based on Error Correction Model
    Zhang, Long
    Hu, Binqi
    Cheng, Tao
    Zhou, Yong
    Zhang, Yongxi
    Lai, Shaoyuan
    2009 IEEE INTERNATIONAL CONFERENCE ON INDUSTRIAL ENGINEERING AND ENGINEERING MANAGEMENT, VOLS 1-4, 2009, : 1699 - +
  • [24] A Text Error Correction Model based on Hierarchical Editing Framework
    Ye J.-M.
    Luo D.-X.
    Chen S.
    Tien Tzu Hsueh Pao/Acta Electronica Sinica, 2021, 49 (02): : 401 - 407
  • [25] Research on The Model of Chiller Efficiency Prediction Based on Error Correction
    Wang Pu
    Zeng Wenhao
    Gao Xuejin
    PROCEEDINGS OF THE 38TH CHINESE CONTROL CONFERENCE (CCC), 2019, : 1660 - 1665
  • [26] Fingerprint orientation correction based on the optimal model residual error
    Chen, Wei-Min
    Li, Jian-Wei
    Xu, Dong-Xia
    Wang, Xu-Chu
    Guangdian Gongcheng/Opto-Electronic Engineering, 2006, 33 (08): : 26 - 31
  • [27] Static Source Error Correction Model Based on MATLAB and Simulink
    Xu, Zhenteng
    Cheng, Cheng
    Li, Yanjun
    2019 PROGNOSTICS AND SYSTEM HEALTH MANAGEMENT CONFERENCE (PHM-QINGDAO), 2019,
  • [28] English Grammar Error Correction Algorithm Based on Classification Model
    Zhou, Shanchun
    Liu, Wei
    COMPLEXITY, 2021, 2021
  • [29] Range correction method based on error model and disturbance identification
    63961 Troop of PLA, Beijing 100012, China
    不详
    Dandao Xuebao/Journal of Ballistics, 2006, 18 (01): : 42 - 44
  • [30] VOLATILITY FORECAST BASED ON INTELLIGENT EGARCH ERROR CORRECTION MODEL
    Hou, Liqiang
    Yang, Shanlin
    TEHNICKI VJESNIK-TECHNICAL GAZETTE, 2013, 20 (06): : 961 - 968
12345