Special micro-electro-mechanical systems pressure sensor

被引：0
|
作者：
Jiang, Zhuangde [1 ]
Tian, Bian [1 ]
Zhao, Yulong [1 ]
Zhao, Libo [1 ]
机构：
[1] State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Jixie Gongcheng Xuebao/Journal of Mechanical Engineering | 2013年 / 49卷 / 06期
关键词：
All Open Access; Bronze;
D O I：
10.3901/JME.2013.06.187
中图分类号：
学科分类号：
摘要：
14
引用
收藏
页码：187 / 197
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