Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization

被引：0
|
作者：
Folkmer, B. [1 ]
Siber, A. [2 ]
Bley, W. Großse [3 ]
Sandmaier, H. [1 ]
Lang, W. [1 ]
机构：
[1] Hahn-Schickard-Inst. Micro- Info. T., Wilhelm-Schickard-Str. 10, D., Villingen, Germany
[2] Gesellschaft F. Sensoren, Wilhelm-Schickard-Str. 10, D., Villingen, Germany
[3] Leybold Vakuum, Wilhelm-Schickard-Str. 10, D., Villingen, Germany
来源：
Sensors and Actuators, A: Physical | 1999年 / 74卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：190 / 192
相关论文
共 50 条
  • [1] Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization
    Folkmer, B
    Siber, A
    Bley, WG
    Sandmaier, H
    Lang, W
    SENSORS AND ACTUATORS A-PHYSICAL, 1999, 74 (1-3) : 190 - 192
  • [2] Micro-Electro-Mechanical Resonant Tilt Sensor
    Zou, Xudong
    Thiruvenkatanathan, Pradyumna
    Seshia, Ashwin A.
    2012 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (FCS), 2012,
  • [3] Special micro-electro-mechanical systems pressure sensor
    Jiang, Zhuangde
    Tian, Bian
    Zhao, Yulong
    Zhao, Libo
    Jixie Gongcheng Xuebao/Journal of Mechanical Engineering, 2013, 49 (06): : 187 - 197
  • [4] A high-resolution micro-electro-mechanical resonant tilt sensor
    Zou, Xudong
    Thiruvenkatanathan, Pradyurnna
    Seshia, Ashwin A.
    SENSORS AND ACTUATORS A-PHYSICAL, 2014, 220 : 168 - 177
  • [5] Analyzing of micro-electro-mechanical systems (MEMS) sensor for pumping aggregates
    Milovancevic, Milos
    Tijan, Edvard
    SENSOR REVIEW, 2018, 38 (02) : 194 - 198
  • [6] Bounded-but-unknown uncertainty optimization of micro-electro-mechanical systems
    Gurav, SP
    Langelaar, M
    Goosen, JFL
    van Keulen, F
    COMPUTATIONAL FLUID AND SOLID MECHANICS 2003, VOLS 1 AND 2, PROCEEDINGS, 2003, : 2291 - 2293
  • [7] Micro-Electro-Mechanical Resonant Tilt Sensor with 250 Nano-Radian Resolution
    Zou, Xudong
    Thiruvenkatanathan, Pradyumna
    Seshia, Ashwin A.
    2013 JOINT EUROPEAN FREQUENCY AND TIME FORUM & INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (EFTF/IFC), 2013, : 54 - 57
  • [8] Dynamic analysis of micro-electro-mechanical systems
    Shi, F
    Ramesh, P
    Mukherjee, S
    INTERNATIONAL JOURNAL FOR NUMERICAL METHODS IN ENGINEERING, 1996, 39 (24) : 4119 - 4139
  • [9] Micro-Electro-Mechanical Systems in Light Stabilization
    Gilewski, Marian
    SENSORS, 2023, 23 (06)
  • [10] Design Automation for Micro-Electro-Mechanical Systems
    Kriebel, David
    Schmidt, Henry
    Schiebold, Michael
    Freitag, Markus
    Arnold, Benjamin
    Naumann, Michael
    Mehner, Jan. E.
    CAS 2018 PROCEEDINGS: 2018 INTERNATIONAL SEMICONDUCTOR CONFERENCE, 2018, : 43 - 50
12345