Improved simulation for strongly coupled micro-electro-mechanical systems: resonant vacuum sensor optimization

被引：0
|
作者：
Folkmer, B. [1 ]
Siber, A. [2 ]
Bley, W. Großse [3 ]
Sandmaier, H. [1 ]
Lang, W. [1 ]
机构：
[1] Hahn-Schickard-Inst. Micro- Info. T., Wilhelm-Schickard-Str. 10, D., Villingen, Germany
[2] Gesellschaft F. Sensoren, Wilhelm-Schickard-Str. 10, D., Villingen, Germany
[3] Leybold Vakuum, Wilhelm-Schickard-Str. 10, D., Villingen, Germany
来源：
Sensors and Actuators, A: Physical | 1999年 / 74卷 / 01期
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页码：190 / 192
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