Mechanical properties measurement of materials and devices at micro- and nano-scale by optical methods: A review

被引：0
|
作者：
Liu, Mengxiong [1 ]
Li, Xide [1 ]
机构：
[1] Department of Engineering Mechanics, Center for Nano and Micro Mechanics, and Applied Mechanics Lab, Tsinghua University, Beijing,100084, China
来源：
Optics and Lasers in Engineering | 2022年 / 150卷
基金：
中国国家自然科学基金;
关键词：
Scanning electron microscopy;
D O I：
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学科分类号：
摘要：
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