Effects of trivalent lanthanide (La and Nd) doped ceria abrasives on chemical mechanical polishing

被引：0
|
作者：
Kim, Eungchul [1 ]
Lee, Jaewon [1 ]
Bae, Chulwoo [2 ]
Seok, Hyunho [2 ]
Kim, Hyeong-U [3 ]
Kim, Taesung [1 ,2 ]
机构：
[1] School of Mechanical Engineering, Sungkyunkwan University, Suwon,16419, Korea, Republic of
[2] SKKU Advanced Institute of Nanotechnology (SAINT), Sungkyunkwan University, Suwon,16419, Korea, Republic of
[3] Plasma Engineering Laboratory, Korea Institute of Machinery and Materials (KIMM), Daejeon,34103, Korea, Republic of
来源：
Powder Technology | 2022年 / 397卷
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摘要：
Rare earth elements
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