The synergistic effects of additives on the micro vias copper filling

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作者
Tao, Zhihua [1 ]
Long, Zhiyuan [1 ]
Tengxu, Linjie [1 ]
Liu, Guanting [1 ]
Tao, Xuefei [2 ]
机构
[1] School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu,610054, China
[2] Jiangxi Vocational College of Finance and Economics, Jiujiang,332000, China
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摘要
Electroplating
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