Crystalline quality improvement of face-to-face annealed MOVPE-grown AlN on vicinal sapphire substrate with sputtered nucleation layer

被引：0
|
作者：
Kuboya, Shigeyuki [1 ]
Uesugi, Kenjiro [1 ]
Shojiki, Kanako [2 ]
Tezen, Yuta [1 ]
Norimatsu, Kenji [1 ]
Miyake, Hideto [2 ,3 ]
机构：
[1] Strategic Planning Office for Regional Revitalization, Mie University, 1577 Kurimamachiya, Tsu,Mie,514-8507, Japan
[2] Graduate School of Engineering, Mie University, 1577 Kurimamachiya, Tsu,Mie,514-8507, Japan
[3] Graduate School of Regional Innovation Studies, Mie University, 1577 Kurimamachiya, Tsu,Mie,514-8507, Japan
来源：
Journal of Crystal Growth | 2020年 / 545卷
关键词：
Aluminum nitride;
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摘要：
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