Axial peak extraction in the measurement of subsurface structures with annular illumination confocal microscopy

被引：0
|
作者：
Jiang, Yong [1 ]
Liu, Chenguang [1 ]
Zou, Chongliang [1 ]
Liu, Jian [1 ]
机构：
[1] Harbin Inst ofTechnol, Adv Microscopy & Instrumentat Res Ctr, Sch Instrumentat Sci & Engn, Harbin 150001, Peoples R China
来源：
SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES | 2024年 / 12卷 / 03期
关键词：
dark-field; confocal microscopy; axial peak extraction; fitting algorithm; LASER-INDUCED DAMAGE; FUSED-SILICA OPTICS; SIGNAL EVALUATION;
D O I：
10.1088/2051-672X/ad6b3c
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc2 tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.
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页数：9
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共 21 条
  • [1] IMPROVEMENT OF AXIAL RESOLUTION IN CONFOCAL MICROSCOPY USING AN ANNULAR PUPIL
    SHEPPARD, CJR
    GU, M
    OPTICS COMMUNICATIONS, 1991, 84 (1-2) : 7 - 13
  • [2] Improvement of axial resolution in confocal microscopy using heterodyne illumination
    Lee, SeungWoo
    Yoo, Hongki
    Chun, Byung S. Eon
    Chun, Wanhee
    Gweon, Dae-gab
    CONFOCAL, MULTIPHOTON, AND NONLINEAR MICROSCOPIC IMAGING III, 2007, 6630
  • [3] Influence of optical aberrations on the peak extraction in confocal microscopy
    Chen, Cheng
    Wang, Jian
    Zhang, Chi
    Lu, Wenlong
    Liu, Xiaojun
    Lei, Zili
    Yang, Wenjun
    Jiang, Xiangqian Jane
    OPTICS COMMUNICATIONS, 2019, 449 : 24 - 32
  • [4] TUNABLE AXIAL SUPERRESOLUTION BY ANNULAR BINARY FILTERS - APPLICATION TO CONFOCAL MICROSCOPY
    MARTINEZCORRAL, M
    ANDRES, P
    OJEDACASTANEDA, J
    SAAVEDRA, G
    OPTICS COMMUNICATIONS, 1995, 119 (5-6) : 491 - 498
  • [5] IMPROVED AXIAL RESOLUTION IN CONFOCAL FLUORESCENCE MICROSCOPY USING ANNULAR PUPILS
    GU, M
    TANNOUS, T
    SHEPPARD, CJR
    OPTICS COMMUNICATIONS, 1994, 110 (5-6) : 533 - 539
  • [6] Axial apodization in 4Pi-confocal microscopy by annular binary filters
    Martínez-Corral, M
    Pons, A
    Caballero, MT
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2002, 19 (08): : 1532 - 1536
  • [7] Tunable axial superresolution by annular binary filters. Application to confocal microscopy
    Martinez-Corral, Manuel, 1600, Elsevier Science B.V., Amsterdam, Netherlands (119): : 5 - 6
  • [8] Thickness Measurement for Glass Slides Based on Chromatic Confocal Microscopy with Inclined Illumination
    Yu, Qing
    Zhang, Yali
    Shang, Wenjian
    Dong, Shengchao
    Wang, Chong
    Wang, Yin
    Liu, Ting
    Cheng, Fang
    PHOTONICS, 2021, 8 (05)
  • [9] Influence of sample surface height for evaluation of peak extraction algorithms in confocal microscopy
    Chen, Cheng
    Wang, Jian
    Liu, Xiaojun
    Lu, Wenlong
    Zhu, Hong
    Jiang, Xiangqian
    APPLIED OPTICS, 2018, 57 (22) : 6516 - 6526
  • [10] THE APPLICATION OF POLARIZED CONFOCAL MICROSCOPY FOR THE SIZE MEASUREMENT OF RESIST STRUCTURES
    HELL, S
    WIJNAENDTSVANRESANDT, RW
    OPTICAL STORAGE AND SCANNING TECHNOLOGY, 1989, 1139 : 92 - 98
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