Axial peak extraction in the measurement of subsurface structures with annular illumination confocal microscopy

被引：0

作者：

Jiang, Yong ^{[1
]}

Liu, Chenguang ^{[1
]}

Zou, Chongliang ^{[1
]}

Liu, Jian ^{[1
]}

机构：

[1] Harbin Inst ofTechnol, Adv Microscopy & Instrumentat Res Ctr, Sch Instrumentat Sci & Engn, Harbin 150001, Peoples R China

来源：

SURFACE TOPOGRAPHY-METROLOGY AND PROPERTIES | 2024年 / 12卷 / 03期

关键词：

dark-field; confocal microscopy; axial peak extraction; fitting algorithm; LASER-INDUCED DAMAGE; FUSED-SILICA OPTICS; SIGNAL EVALUATION;

D O I：

10.1088/2051-672X/ad6b3c

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Three-dimensional dark-field confocal microscopy (DFCM) using annular illumination and complementary detection apertures is capable of detecting subsurface defects in ultra-precision optical components. In this study, a DFCM tuning algorithm for large apertures is proposed based on the sinc2 tuning model. This algorithm provides a reliable and theoretically accurate method for extracting the axial position during the measurement of subsurface defects. The rationality and accuracy of this method are verified through simulations and experimental results.

引用

页数：9