High-speed 2D materials inspection using a microscopic dynamic spectroscopic imaging ellipsometer

被引：0

作者：

Choi, Sukhyun ^{[1
,2
]}

Woo, Chae Young ^{[3
]}

Hwang, Gukhyeon ^{[1
]}

Kheiryzadehkhanghah, Saeid ^{[1
]}

Choi, Inho ^{[1
]}

Cho, Yong Jai ^{[2
]}

Lee, Hyung Woo ^{[3
,4
,5
]}

Chegal, Won ^{[2
,6
]}

Kim, Daesuk ^{[1
]}

机构：

[1] Jeonbuk Natl Univ, Dept Mech Syst Engn, Jeonju 54896, South Korea

[2] Korea Res Inst Stand & Sci, Semicond Integrated Metrol Team, Daejeon 34113, South Korea

[3] Pusan Natl Univ, Dept Nano Fus Technol, Busan 46241, South Korea

[4] Pusan Natl Univ, Dept Nanoenergy Engn, Busan 46241, South Korea

[5] Pusan Natl Univ, Res Ctr Energy Convergence Technol, Busan 46241, South Korea

[6] Chungnam Natl Univ, Grad Sch Analyt Sci & Technol GRAST, Daejeon 34134, South Korea

来源：

APPLIED OPTICS | 2024年 / 63卷 / 27期

基金：

新加坡国家研究基金会;

关键词：

THICKNESS; GRAPHENE; ELECTRONICS;

D O I：

10.1364/AO.527455

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We describe a high-speed two-dimensional (2D) materials inspection method by using a microscopic dynamic spectroscopic imaging ellipsometer. This system employs a high-numerical-aperture (NA) objective telecentric lens module. Unlike conventional spectroscopic imaging ellipsometers, which require relatively long acquisition times due to rotating polarization elements, our proposed system uses a monolithic polarizing interferometric module. This allows it to extract a spatio-spectral ellipsometric phase map A(1, x) of 2D materials like graphene. It achieves a spatial resolution of a few microns at a speed of a few tens of milliseconds. In this study, we demonstrate that the proposed microscopic dynamic spectroscopic imaging ellipsometer can provide spectroscopic ellipsometric phase data A(1) with 165 spectral bands in the visible range. It inspects a monolayer graphene flake area of 2.5 mm & lowast; 1.65 mm in just 1 min, which is the fastest 2D materials inspection capability ever reported, to our knowledge. (c) 2024 Optica Publishing Group

引用

页码：7135 / 7144

页数：10

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