共 50 条
- [44] Sidewall slopes and roughness of SU-8 HARMST Microsystem Technologies, 2008, 14 (9-11) : 1777 - 1777
- [45] Optimization of SU-8 processing for integrated optics MICROMACHING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS IV, 2006, 6110
- [47] Glass/SU-8 microchip for electrokinetic applications ELECTROPHORESIS, 2013, 34 (20-21) : 2996 - 3002