共 50 条
- [21] Thick SU-8 photolithography for BioMEMS MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY VIII, 2003, 4979 : 382 - 393
- [22] SU-8 processing on a variety of substrates MATERIALS SCIENCE OF MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICES II, 2000, 605 : 91 - 96
- [26] Origami fabrication of SU-8 supercapacitors PROCEEDINGS OF THE ASME MATERIALS DIVISION, 2005, 100 : 519 - 523
- [27] In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer Microsystem Technologies, 2007, 13 : 253 - 257
- [28] SU-8 cantilever strain sensor with integrated readout based on a piezoresistive SU-8/carbon black composite Micro Total Analysis Systems 2004, Vol 2, 2005, (297): : 482 - 484
- [29] Highly flexible SU-8 microstructures TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
- [30] In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2007, 13 (3-4): : 253 - 257