Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry-Perot filter

被引：0

作者：

Sahani, Pratyasha ^{[1
]}

Nabana, Shiori ^{[1
]}

Okatani, Taiyu ^{[1
]}

Inomata, Naoki ^{[1
]}

Kanamori, Yoshiaki ^{[1
]}

机构：

[1] Tohoku Univ, Grad Sch Engn, Dept Robot, Sendai, Miyagi 9808579, Japan

来源：

AIP ADVANCES | 2024年 / 14卷 / 07期

关键词：

MINIATURE SPECTROMETER; OPTICAL FILTER; ARRAY;

D O I：

10.1063/5.0214684

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry-Perot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air gap dimension in the tunable air gap FPF. The wavelength calibration is performed by utilizing the spectrally-selective and spatially-resolved transmission characteristics of the tunable air gap FPF and the static gradient thickness filter, respectively. The MEMS-compatible chip-level integration of the static gradient thickness filter facilitates device miniaturization to enable its use in handheld devices.

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页数：6

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