Wavelength calibration using MEMS-enabled double filter configuration for air gap sensing in the tunable Fabry-Perot filter

被引：1
|
作者：
Sahani, Pratyasha [1 ]
Nabana, Shiori [1 ]
Okatani, Taiyu [1 ]
Inomata, Naoki [1 ]
Kanamori, Yoshiaki [1 ]
机构：
[1] Tohoku Univ, Grad Sch Engn, Dept Robot, Sendai, Miyagi 9808579, Japan
来源：
AIP ADVANCES | 2024年 / 14卷 / 07期
关键词：
MINIATURE SPECTROMETER; OPTICAL FILTER; ARRAY;
D O I：
10.1063/5.0214684
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry-Perot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air gap dimension in the tunable air gap FPF. The wavelength calibration is performed by utilizing the spectrally-selective and spatially-resolved transmission characteristics of the tunable air gap FPF and the static gradient thickness filter, respectively. The MEMS-compatible chip-level integration of the static gradient thickness filter facilitates device miniaturization to enable its use in handheld devices.
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页数：6
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