Sputtering of titanium and tungsten carbide films from the surface titanium and tungsten by helium ions of medium energies bombardment

被引：0
|
作者：
Manukhin V.V. [1 ]
机构：
[1] National Research University "MPEI", 14 Krasnokazarmennaya st., Moscow
来源：
Applied Physics | 2022年 / 03期
关键词：
ion bombardment; layered surface; light ions; metal carbide; modified surface; partial sputtering yield; sputtering; sputtering yield;
D O I：
10.51368/1996-0948-2022-3-67-72
中图分类号：
学科分类号：
摘要：
The analytical model of sputtering of binary layered inhomogeneous targets is applied to the case of sputtering of metal carbide films from the metal surface with helium ions. On the basis of the model, an analytical formula was obtained that allows to calculate the complete and partial sputtering yields of inhomogeneous targets by light ions. The calculation results of the total sputtering yields of titanium and tungsten carbide films from the surface of metals by helium ions are given in comparison with the results of computer simulation. © 2022 Federal Informational-Analytical Center of the Defense Industry. All rights reserved.
引用
收藏
页码：67 / 72
页数：5
相关论文
共 50 条
  • [41] Enhanced formation of nanometric titanium cones by incorporation of titanium, tungsten and/or iron in a helium ion beam
    Sanchez, Fabien
    Steiner, R.
    Lattner, P.
    Spicher, J.
    Mathys, D.
    Antunes, R.
    Kisiel, M.
    Mukaddam, K.
    Astasov-Frauenhoffer, M.
    Kuhl, S.
    Koser, J.
    Wagner, R. S.
    Marot, L.
    Meyer, E.
    SURFACES AND INTERFACES, 2022, 35
  • [42] Evaluation of the Component Composition and Thickness of the Modified Layer of Tungsten and Tantalum Carbides during Stationary Sputtering by Helium Ions Bombardment
    Manukhin, V. V.
    JOURNAL OF SURFACE INVESTIGATION, 2024, 18 (05): : 1100 - 1104
  • [43] Molecular dynamics simulations of temperature effect on tungsten sputtering yields under helium bombardment
    Meng, QingLing
    Niu, LiangLiang
    Zhang, Ying
    Lu, GuangHong
    SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY, 2018, 61 (01)
  • [44] Molecular dynamics simulations of temperature effect on tungsten sputtering yields under helium bombardment
    QingLing Meng
    LiangLiang Niu
    Ying Zhang
    GuangHong Lu
    Science China Physics, Mechanics & Astronomy, 2018, 61
  • [45] Molecular dynamics simulations of temperature effect on tungsten sputtering yields under helium bombardment
    QingLing Meng
    LiangLiang Niu
    Ying Zhang
    GuangHong Lu
    Science China(Physics,Mechanics & Astronomy), 2018, Mechanics & Astronomy)2018 (01) : 76 - 79
  • [46] Surface modification of tungsten carbide by electrical discharge coating (EDC) using a titanium powder suspension
    Janmanee, Pichai
    Muttamara, Apiwat
    APPLIED SURFACE SCIENCE, 2012, 258 (19) : 7255 - 7265
  • [47] Transition from tungsten erosion to carbon layer deposition with simultaneous bombardment of tungsten by helium and carbon
    Bizyukov, Ivan
    Krieger, Karl
    JOURNAL OF APPLIED PHYSICS, 2007, 101 (10)
  • [48] The Regularities of Titanium and Tungsten Carbide Formation from Products of Electric Explosion Destruction of Conductors
    Adamchuk, Yu. O.
    Chushchak, S. V.
    Boguslavskii, L. Z.
    Sinchuk, A. V.
    SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY, 2023, 59 (03) : 281 - 289
  • [49] The Regularities of Titanium and Tungsten Carbide Formation from Products of Electric Explosion Destruction of Conductors
    Yu. O. Adamchuk
    S. V. Chushchak
    L. Z. Boguslavskii
    A. V. Sinchuk
    Surface Engineering and Applied Electrochemistry, 2023, 59 : 281 - 289
  • [50] Speciation of titanium in tungsten carbide scrap before, during and after its processing for tungsten and cobalt recovery
    Singh, RP
    Miller, MJ
    TITANIUM: EXTRACTION AND PROCESSING, 1996, : 31 - 43
12345