Key technologies and application prospect analysis of interferometric of integrated optical gyro

被引：0
|
作者：
Jiao, Hongchen [1 ,2 ]
Wang, Lingyu [1 ,2 ]
Sun, Daoxin [1 ,2 ]
Lu, Zhizhou [3 ]
Jin, Li [3 ]
Feng, Junbo [3 ]
Xu, Wenyuan [4 ]
Feng, Lishuang [1 ,2 ]
机构：
[1] Beihang University, School of Instrumentation and Optoelectronic Engineering, Beijing,100191, China
[2] Beihang University, National Key Laboratory of Inertial Technology, Beijing,100191, China
[3] Chongqing United Microelectronics Center (CUMEC), Chongqing,401332, China
[4] Chongqing Zixingzhe Technology, Chongqing,402260, China
来源：
Zhongguo Guanxing Jishu Xuebao/Journal of Chinese Inertial Technology | 2023年 / 31卷 / 08期
关键词：
714.3 Waveguides - 804.2 Inorganic Compounds - 941.4 Optical Variables Measurements;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Silicon nitride
引用
收藏
页码：743 / 749
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