CRYSTAL-GROWTH OF TITANIUM NITRIDE BY CHEMICAL VAPOR-DEPOSITION

被引：75

作者：

KATO, A ^{[1
]}

TAMARI, N ^{[1
]}

机构：

[1] KYUSHU UNIV,FAC ENGN,DEPT APPL CHEM,FUKUOKA,JAPAN

来源：

JOURNAL OF CRYSTAL GROWTH | 1975年 / 29卷 / 01期

关键词：

D O I：

10.1016/0022-0248(75)90048-2

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：55 / 60

页数：6

共 50 条

[1] DIAMOND CRYSTAL-GROWTH BY PLASMA CHEMICAL VAPOR-DEPOSITION
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FLAMM, DL
IBBOTSON, DE
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[J]. JOURNAL OF APPLIED PHYSICS, 1988, 63 (05) : 1744 - 1748
[2] CRYSTAL-GROWTH OF IRON SILICIDE BY CHEMICAL VAPOR-DEPOSITION
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ITO, E
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[J]. JOURNAL OF MATERIALS SCIENCE LETTERS, 1989, 8 (08) : 912 - 914
[3] CRYSTAL-GROWTH OF ZIRCONIUM CARBIDE BY CHEMICAL VAPOR-DEPOSITION
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[J]. NIPPON KAGAKU KAISHI, 1977, (05) : 650 - 655
[4] CRYSTAL-GROWTH MECHANISMS OF SEMICONDUCTORS BY CHEMICAL VAPOR-DEPOSITION
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[J]. ACTA ELECTRONICA, 1978, 21 (03): : 221 - 230
[5] KINETICS OF CHEMICAL VAPOR-DEPOSITION OF TITANIUM NITRIDE
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (01) : 322 - 328
[6] PERFECT CRYSTAL-GROWTH OF SILICON BY VAPOR-DEPOSITION
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (05) : 664 - 669
[7] LASER ENHANCED METALORGANIC CHEMICAL VAPOR-DEPOSITION CRYSTAL-GROWTH IN GAAS
AOYAGI, Y
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NAMBA, S
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[J]. APPLIED PHYSICS LETTERS, 1985, 47 (02) : 95 - 96
[8] CHEMICAL VAPOR-DEPOSITION OF TITANIUM NITRIDE ON CEMENTED CARBIDES
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CHO, T
YAMAYA, S
[J]. JOURNAL OF THE JAPAN INSTITUTE OF METALS, 1977, 41 (06) : 542 - 545
[9] GOLD CRYSTAL-GROWTH BY PHOTOTHERMAL LASER-INDUCED CHEMICAL VAPOR-DEPOSITION
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[10] CHEMICAL VAPOR-DEPOSITION OF TITANIUM NITRIDE ON PLASMA NITRIDED STEEL
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[J]. JOURNAL OF MATERIALS SCIENCE, 1988, 23 (04) : 1481 - 1485

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