INFLUENCE OF SURFACE DEFECTS ON SPUTTERING

被引：1
|
作者：
VERNICKE.H
机构：
来源：
ZEITSCHRIFT FUR NATURFORSCHUNG PART A-ASTROPHYSIK PHYSIK UND PHYSIKALISCHE CHEMIE | 1966年 / A 21卷 / 08期
关键词：
D O I：
10.1515/zna-1966-0819
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：1308 / &
相关论文
共 50 条
  • [21] Sub-surface defects induced by low energy Ar+ sputtering of silver
    Naia, M. Duarte
    Gordo, P. M.
    Teodoro, O. M. N. D.
    de Lima, A. P.
    Moutinho, A. M. C.
    Brusa, R. S.
    ADVANCED MATERIALS FORUM III, PTS 1 AND 2, 2006, 514-516 : 1608 - 1612
  • [22] Surface defects and arc generation in reactive magnetron sputtering of aluminium oxide thin films
    Koski, K
    Hölsä, J
    Juliet, P
    SURFACE & COATINGS TECHNOLOGY, 1999, 115 (2-3): : 163 - 171
  • [23] Influence of surface defects on superlattice patterns in graphene on graphite
    Remskar, Maja
    Jelenc, Janez
    SURFACE SCIENCE, 2016, 651 : 51 - 56
  • [24] INFLUENCE OF PLANAR DEFECTS ON SUPERCONDUCTING SURFACE NUCLEATION FIELDS
    TILLEY, DR
    JOURNAL OF PHYSICS PART C SOLID STATE PHYSICS, 1968, 1 (02): : 293 - +
  • [25] Influence of Uneven Lighting on Quantitative Indicators of Surface Defects
    Konovalenko, Ihor
    Maruschak, Pavlo
    Kozbur, Halyna
    Brezinova, Janette
    Brezina, Jakub
    Nazarevich, Bohdan
    Shkira, Yaroslav
    MACHINES, 2022, 10 (03)
  • [26] Influence of surface defects on the tensile strength of carbon fibers
    Vautard, F.
    Dentzer, J.
    Nardin, M.
    Schultz, J.
    Defoort, B.
    APPLIED SURFACE SCIENCE, 2014, 322 : 185 - 193
  • [27] Influence of Pulsed Gas Feeding on Surface Defects and Mechanical Properties of Ti/TiN Multilayered Films deposited by Ion Beam Assisted Magnetron Sputtering
    Fu Zhiqiang
    Ren Yi
    Wang Chengbiao
    Yue Wen
    Lin Songsheng
    MATERIALS SCIENCE, CIVIL ENGINEERING AND ARCHITECTURE SCIENCE, MECHANICAL ENGINEERING AND MANUFACTURING TECHNOLOGY, PTS 1 AND 2, 2014, 488-489 : 48 - +
  • [28] Surface defects on SOI wafers and their influence on device characteristics
    Naruoka, H
    Hattori, N
    Iwamatsu, T
    Ipposhi, T
    Sudo, M
    Nakai, T
    Yamamoto, H
    Mashiko, Y
    ELECTRONICS AND COMMUNICATIONS IN JAPAN PART II-ELECTRONICS, 2003, 86 (07): : 64 - 72
  • [29] Influence of surface defects on the vortex transitions in mesoscopic superconductors
    Baelus, B. J.
    Kadowaki, K.
    Peeters, F. M.
    LOW TEMPERATURE PHYSICS, PTS A AND B, 2006, 850 : 745 - +
  • [30] Influence of surface defects on the characteristics of GaN Schottky diodes
    Duboz, JY
    Binet, F
    Laurent, N
    Rosencher, E
    Scholz, F
    Harle, V
    Briot, O
    Gil, B
    Aulombard, RL
    III-V NITRIDES, 1997, 449 : 1085 - 1090
12345