共 50 条
- [42] Oxidation of Amorphous Layers of Silicon Nitride. Neorganiceskie materialy, 1980, 16 (08): : 1420 - 1425
- [45] EFFECT OF HYDROGEN ON PHOTOLUMINESCENCE SPECTRA OF SILICON-NITRIDE AMORPHOUS FILMS PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1986, 95 (01): : K37 - K42
- [46] Microstructure characterization of amorphous silicon-nitride films by effusion measurements AMORPHOUS AND POLYCRYSTALLINE THIN-FILM SILICON SCIENCE AND TECHNOLOGY 2006, 2007, 910 : 143 - 148
- [47] CONDUCTIVITY OF AMORPHOUS SILICON-NITRIDE IN HIGH ELECTRIC-FIELDS PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1977, 44 (02): : K167 - K170