MICRO-RAMAN ANALYSIS OF STRESS IN MACHINED SILICON AND GERMANIUM

被引：28
|
作者：
SPARKS, RG
PAESLER, MA
机构：
来源：
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1988年 / 10卷 / 04期
关键词：
D O I：
10.1016/0141-6359(88)90053-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：191 / 198
页数：8
相关论文
共 50 条
  • [31] Micro-Raman Scattering of Nanoscale Silicon in Amorphous and Porous Silicon
    Periasamy, Sangeetha
    Venkidusamy, Sasirekha
    Venkatesan, Ragavendran
    Mayandi, Jeyanthinath
    Pearce, Joshua
    Selj, Josefine Helene
    Veerabahu, Ramakrishnan
    ZEITSCHRIFT FUR PHYSIKALISCHE CHEMIE-INTERNATIONAL JOURNAL OF RESEARCH IN PHYSICAL CHEMISTRY & CHEMICAL PHYSICS, 2017, 231 (09): : 1585 - 1598
  • [32] Micro-Raman and Spreading Resistance Analysis on Beveled Implanted Germanium for Layer Transfer Applications
    Rainey, Paul
    Wasyluk, Joanna
    Perova, Tatiana
    Hurley, Richard
    Mitchell, Neil
    McNeill, David
    Gamble, Harold
    Armstrong, Mervyn
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 14 (02) : H69 - H72
  • [33] Micro-Raman stress of polycrystalline diamond compact
    Xu, Guo-Ping
    Yin, Zhi-Min
    Chen, Qi-Wu
    Xu, Gen
    Zhongnan Daxue Xuebao (Ziran Kexue Ban)/Journal of Central South University (Science and Technology), 2010, 41 (04): : 1310 - 1314
  • [34] Stress Analysis of Si Chip Sidewalls using Micro-Raman Spectroscopy
    De Biasio, M.
    Kraft, M.
    Ong, R.
    Seifert, C.
    Ossiander, M.
    Bernard, B.
    Roesner, M.
    NEXT-GENERATION SPECTROSCOPIC TECHNOLOGIES XIII, 2020, 11390
  • [35] Micro-Raman analysis of coloured lithographs
    K. Castro
    P. Vandenabeele
    M. D. Rodríguez-Laso
    L. Moens
    J. M. Madariaga
    Analytical and Bioanalytical Chemistry, 2004, 379 : 674 - 683
  • [36] Micro-Raman analysis of coloured lithographs
    Castro, K
    Vandenabeele, P
    Rodríguez-Laso, MD
    Moens, L
    Madariaga, JM
    ANALYTICAL AND BIOANALYTICAL CHEMISTRY, 2004, 379 (04) : 674 - 683
  • [37] Micro-Raman Spectroscopy Analysis of Residual Stress in Polysilicon MEMS Resonators
    Zhao, Chenxu
    Li, Mengwei
    Yin, Ming
    Liu, Zewen
    2013 8TH ANNUAL IEEE INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (IEEE NEMS 2013), 2013, : 570 - 573
  • [38] Composition and stress analysis in si structures using micro-Raman spectroscopy
    McCarthy, J
    Bhattacharya, S
    Perova, TS
    Moore, RA
    Gamble, H
    Armstrong, BM
    SCANNING, 2004, 26 (05) : 235 - 239
  • [39] The Dependence of Micro-Raman Spectra on Hydrogenation in Nanocrystalline Silicon
    Lyou, Jong H.
    PHYSICS OF SEMICONDUCTORS: 30TH INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS, 2011, 1399
  • [40] SIMULTANEOUS MICROPHOTOLUMINESCENCE AND MICRO-RAMAN SCATTERING IN POROUS SILICON
    MONIN, Y
    SAVIOT, L
    CHAMPAGNON, B
    ESNOUF, C
    HALIMAOUT, A
    THIN SOLID FILMS, 1995, 255 (1-2) : 188 - 190
12345