MICRO-RAMAN ANALYSIS OF STRESS IN MACHINED SILICON AND GERMANIUM

被引：28
|
作者：
SPARKS, RG
PAESLER, MA
机构：
来源：
PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1988年 / 10卷 / 04期
关键词：
D O I：
10.1016/0141-6359(88)90053-0
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：191 / 198
页数：8
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