INITIAL NUCLEATION OF PHOTO-CVD AMORPHOUS-SILICON BY PHOTODECOMPOSITION OF DISILANE

被引：0
|
作者：
KAWASAKI, M
HAYASHI, K
TSUKIYAMA, Y
HADA, H
机构：
来源：
NIPPON KAGAKU KAISHI | 1987年 / 11期
关键词：
D O I：
10.1246/nikkashi.1987.1928
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
引用
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页码：1928 / 1933
页数：6
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