IMPROVEMENTS IN THE DISILANE PLASMA DEPOSITION OF HYDROGENATED AMORPHOUS-SILICON SOLAR-CELLS

被引：3
|
作者：
VANIER, PE [1 ]
SU, FC [1 ]
机构：
[1] SUNY STONY BROOK,DEPT MAT SCI & ENGN,STONY BROOK,NY 11794
来源：
SOLAR CELLS | 1987年 / 21卷
关键词：
D O I：
10.1016/0379-6787(87)90116-5
中图分类号：
TE [石油、天然气工业]; TK [能源与动力工程];
学科分类号：
0807 ; 0820 ;
摘要：
引用
收藏
页码：167 / 175
页数：9
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