ABERRATION CALCULATION FOR COMBINED MAGNETIC FOCUSING DEFLECTION SYSTEMS WITH CURVED AXES

被引：1

作者：

XIMEN, JY ^{[1
]}

LIU, ZX ^{[1
]}

机构：

[1] BEIJING UNIV, DEPT RADIO ELECTR, BEIJING 100871, PEOPLES R CHINA

来源：

JOURNAL OF APPLIED PHYSICS | 1993年 / 73卷 / 04期

关键词：

D O I：

10.1063/1.353237

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The general aberration theory for combined electromagnetic focusing-deflection systems with curved axes will be applied to a scanning electron microscopic system and an electron lithographic system. All third order geometric and first order chromatic aberrations have been calculated along rectilinear/curvilinear axes. The important identities between some aberration coefficients will be verified numerically. The geometric and chromatic aberrations calculated along the matching curvilinear axis will be compared with those along the rectilinear axis. The computational trials may be of help for explaining the mechanism of moving/swinging objective lens and variable axis lens systems.

引用

页码：1570 / 1575

页数：6

共 50 条

[31] ASYMPTOTIC ABERRATIONS OF COMBINED ELECTROSTATIC FOCUSING-DEFLECTION SYSTEMS
TANG, TT
OPTIK, 1986, 74 (02): : 43 - 47
[32] STUDY ON MAGNETIC FOCUSING AND DEFLECTION ELECTRON MICROBEAM PROBE SYSTEMS
TANG, TT
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1995, 363 (1-2): : 326 - 329
[33] DYNAMIC FOCUSING IN MAGNETIC DEFLECTION
WANG, CT
JOURNAL OF APPLIED PHYSICS, 1966, 37 (13) : 5007 - &
[34] ON DYNAMIC FOCUSING IN MAGNETIC DEFLECTION
LOTSCH, HKV
JOURNAL OF APPLIED PHYSICS, 1967, 38 (08) : 3423 - &
[35] ON THE RELATIVISTIC 5TH ORDER GEOMETRICAL ABERRATION EQUATION OF A COMBINED FOCUSING-DEFLECTION SYSTEM
YU, L
OPTIK, 1986, 74 (02): : 65 - 70
[36] Study on wide beam curved optical axes focusing for magnetic immersed lenses without crossovers
Cheng, M
Tang, TT
OPTIK, 2000, 111 (11): : 509 - 513
[37] FOCUSING DEFLECTION BY FLEXIBLE CURVED SOLENOID COIL.
Kishi, Tohru
Takagi, Toshinori
1600, (66):
[38] Deflection systems with energy focusing
L. A. Baranova
S. Ya. Yavor
Technical Physics, 1997, 42 (1) : 113 - 114
[39] CALCULATION OF COMBINED ELECTRON-OPTICAL FOCUSING AND DEFLECTION SYSTEMS WITH SUPERIMPOSED FIELDS .1. FIELD EXPANSION AND TRAJECTORY EQUATION
PLIES, E
SIEMENS FORSCHUNGS-UND ENTWICKLUNGSBERICHTE-SIEMENS RESEARCH AND DEVELOPMENT REPORTS, 1982, 11 (01): : 38 - 45
[40] CHROMATIC ABERRATION IN A DEFLECTION SYSTEM FOR A PRISM MASS SPECTROMETER WITH ENERGY FOCUSING
KELMAN, VM
RODNIKOV.IV
YAKUSHEV, EM
SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1971, 15 (07): : 1113 - &

← 1 2 3 4 5 →