RESULTS OF A MULTISITE ROUND-ROBIN TO EXAMINE PROBED MEASUREMENTS OF AN IMPEDANCE STANDARD SUBSTRATE

The results from a round-robin measurement using microwave coplanar waveguide probes are presented. The round-robin was initiated and coordinated by the TRW Equipment Management Center's Measurement Engineering Department (MED). Ten probe sites, within and outside of TRW, participated in the round-robin. Each participant used the same Cascade Microtech Impedance Standard Substrate, the same measurement and calibration structures, the same calibration method, and the same network analyzer conditions. S-parameter measurements were performed over the frequency range of 0.045-26.5 GHz on a 10-dB attenuator and a 20-dB attenuator. In addition to the data comparison between the various probe sites, measurement repeatability results obtained within the TRW Measurement Engineering Department will be presented. © 1990 IEEE