ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF COBALT AND FORMATION OF COBALT DISILICIDE

被引：53
|
作者：
GROSS, ME
KRANZ, KS
BRASEN, D
LUFTMAN, H
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 05期
关键词：
D O I：
10.1116/1.584212
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：1548 / 1552
页数：5
相关论文
共 50 条
  • [41] GROWTH OF ZNO THIN-FILMS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    LAU, CK
    TIKU, SK
    LAKIN, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1979, 126 (08) : C372 - C372
  • [42] CHEMICAL VAPOR-DEPOSITION OF SAMARIUM CHALCOGENIDES FROM ORGANOMETALLIC STARTING MATERIALS
    HILLMAN, PD
    PHILLIPS, AL
    JACOBSON, MR
    GIBSON, UR
    SWENSON, R
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (03) : C93 - C93
  • [43] MECHANISTIC STUDIES OF THE CHEMICAL VAPOR-DEPOSITION OF TIC FROM ORGANOMETALLIC PRECURSORS
    ROGERS, DM
    JENSEN, JA
    GOZUM, JE
    GIROLAMI, GS
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1989, 197 : 382 - INOR
  • [44] EPITAXIAL-GROWTH OF COGA ON GAAS BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    MAURY, F
    TALIN, AA
    KAESZ, HD
    WILLIAMS, RS
    CHEMISTRY OF MATERIALS, 1993, 5 (01) : 84 - 89
  • [45] APPLICATIONS AND TRENDS IN PLASMA-ENHANCED ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    SUHR, H
    SURFACE & COATINGS TECHNOLOGY, 1991, 49 (1-3): : 233 - 238
  • [46] FABRICATION OF FERROMAGNETIC AND ANTIFERROMAGNETIC CHROMIUM OXIDES BY ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    DOWBEN, PA
    KIM, YG
    BARALTOSH, S
    RAMSEYER, GO
    HWANG, CY
    ONELLION, M
    JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 5658 - 5660
  • [47] CHEMICAL VAPOR-DEPOSITION OF NIOBIUM CARBIDE USING A NOVEL ORGANOMETALLIC PRECURSOR
    CHEATHAM, LK
    GRAHAM, JJ
    STUPIK, P
    BARRON, AR
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1990, 199 : 171 - INOR
  • [48] INFRARED LASER-ASSISTED ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION GROWTH
    JUANG, C
    DUBEY, SK
    WISEMAN, TM
    JONES, KA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 728 - 728
  • [49] LATERAL EPITAXIAL OVERGROWTH OF GAAS AND GAALAS ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION
    GALE, RP
    MCCLELLAND, RW
    FAN, JCC
    BOZLER, CO
    INSTITUTE OF PHYSICS CONFERENCE SERIES, 1983, (65): : 101 - 108
  • [50] CHEMICAL VAPOR-DEPOSITION
    ARCHER, NJ
    PHYSICS IN TECHNOLOGY, 1979, 10 (04): : 152 - 161
12345