LOW-TEMPERATURE GETTERING OF CU, AG, AND AU ACROSS A WAFER OF SI BY AL

被引：65
|
作者：
THOMPSON, RD
TU, KN
机构：
来源：
APPLIED PHYSICS LETTERS | 1982年 / 41卷 / 05期
关键词：
D O I：
10.1063/1.93565
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：440 / 442
页数：3
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