INFLUENCE OF ION-BOMBARDMENT DURING CONDENSATION ON THE PROPERTIES OF VACUUM-DEPOSITED THIN-FILMS

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作者：
DUDONIS, J
JOTAUTIS, A
MEILUS, O
MESKAUSKAS, A
PRANEVICIUS, L
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来源：
THIN SOLID FILMS | 1979年 / 58卷 / 01期
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T [工业技术];
学科分类号：
08 ;
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页码：106 / 106
页数：1
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