INFLUENCE OF ION-BOMBARDMENT DURING CONDENSATION ON THE PROPERTIES OF VACUUM-DEPOSITED THIN-FILMS

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作者：

DUDONIS, J

JOTAUTIS, A

MEILUS, O

MESKAUSKAS, A

PRANEVICIUS, L

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来源：

THIN SOLID FILMS | 1979年 / 58卷 / 01期

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T [工业技术];

学科分类号：

08 ;

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页码：106 / 106

页数：1

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