PROPERTIES OF TANTALUM THIN-LAYERS DEPOSITED BY SPUTTERING

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作者：

ANTOLINI, A

AUDINO, R

DESTEFANIS, G

PAPUZZA, C

TAIARIOL, F

TAMAGNO, S

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来源：

ELETTROTECNICA | 1977年 / 64卷 / 08期

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TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：669 / 669

页数：1

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