PROPERTIES OF TANTALUM THIN-LAYERS DEPOSITED BY SPUTTERING

被引：0
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作者：
ANTOLINI, A
AUDINO, R
DESTEFANIS, G
PAPUZZA, C
TAIARIOL, F
TAMAGNO, S
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来源：
ELETTROTECNICA | 1977年 / 64卷 / 08期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：669 / 669
页数：1
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