INVESTIGATION OF DISTRIBUTION OF BORON ATOMS IN SILICON DOPED BY ION BOMBARDMENT

被引：0

作者：

ZORIN, EI

PAVLOV, PV

TETELBAU.DI

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来源：

SOVIET PHYSICS SOLID STATE,USSR | 1968年 / 9卷 / 12期

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中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

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引用

页码：2874 / +

页数：1

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