THIN CARBON AND BN FILMS PREPARED BY RF PLASMA DEPOSITION

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作者：
JANCA, J
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来源：
ACTA PHYSICA SLOVACA | 1987年 / 37卷 / 02期
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O4 [物理学];
学科分类号：
0702 ;
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页码：75 / 81
页数：7
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