AN INFRARED-ABSORPTION STUDY OF LTCVD SILICON DIOXIDE

被引：0
|
作者：
PAVELESCU, C
COBIANU, C
VANCU, A
机构：
[1] SEMICOND CCSITS,CTR RES & DEV,R-72996 BUCHAREST,ROMANIA
[2] IFTM POB MG 7,R-76900 MAGURELE BUCHARES,ROMANIA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1982年 / 129卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C328 / C328
页数：1
相关论文
共 50 条
  • [1] AN INFRARED-ABSORPTION STUDY OF LTCVD SILICON DIOXIDE
    PAVELESCU, C
    COBIANU, C
    VANCU, A
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (04) : 975 - 977
  • [2] A STUDY OF THIN SILICON DIOXIDE FILMS USING INFRARED-ABSORPTION TECHNIQUES
    BOYD, IW
    WILSON, JIB
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (06) : 4166 - 4172
  • [3] ANNEALING STUDY OF THE INFRARED-ABSORPTION IN AN AMORPHOUS-SILICON DIOXIDE FILM
    YIN, Z
    TSU, DV
    LUCOVSKY, G
    SMITH, FW
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1989, 114 (Pt2) : 459 - 461
  • [4] EFFECT OF POROSITY ON INFRARED-ABSORPTION SPECTRA OF SILICON DIOXIDE
    CHOU, JS
    LEE, SC
    JOURNAL OF APPLIED PHYSICS, 1995, 77 (04) : 1805 - 1807
  • [5] INFRARED-ABSORPTION IN GERMANIUM AND SILICON
    GREGORY, DA
    HARRINGTON, JA
    HASS, M
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1977, 67 (02) : 253 - 253
  • [6] THEORY OF INFRARED-ABSORPTION IN SILICON
    WINER, K
    CARDONA, M
    PHYSICAL REVIEW B, 1987, 35 (15): : 8189 - 8195
  • [7] MULTIPHONON INFRARED-ABSORPTION IN SILICON
    PRADHAN, MM
    GARG, RK
    ARORA, M
    INFRARED PHYSICS, 1987, 27 (01): : 25 - 30
  • [8] INFRARED-ABSORPTION OF SILICON IRRADIATED BY PROTONS
    GERASIMENKO, NN
    ROLLE, M
    CHENG, LJ
    LEE, YH
    CORELLI, JC
    CORBETT, JW
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1978, 90 (02): : 689 - 695
  • [9] INFRARED-ABSORPTION BAND FOR SUBSTITUTIONAL NITROGEN IN SILICON
    STEIN, HJ
    APPLIED PHYSICS LETTERS, 1985, 47 (12) : 1339 - 1341
  • [10] INFRARED-ABSORPTION STUDIES OF SILICON IMPLANTED WITH OXYGEN
    DIETRICH, HB
    COMAS, J
    MALMBERG, PR
    REPORT OF NRL PROGRESS, 1974, (AUG): : 17 - 19
12345