BORON DIFFUSION IN SILICON

被引：26
|
作者：
WILLIAMS, EL
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1961年 / 108卷 / 08期
关键词：
D O I：
10.1149/1.2428219
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：795 / 798
页数：4
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