ALLOYING OF THIN PALLADIUM FILMS WITH SINGLE-CRYSTAL AND AMORPHOUS SILICON

被引：43
|
作者：
LEE, DH [1 ]
HART, RR [1 ]
KIEWIT, DA [1 ]
MARSH, OJ [1 ]
机构：
[1] HUGHES AIRCRAFT CO,RES LABS,MALIBU,CA 90265
来源：
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1973年 / 15卷 / 02期
关键词：
D O I：
10.1002/pssa.2210150235
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：645 / 651
页数：7
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