ALLOYING OF THIN PALLADIUM FILMS WITH SINGLE-CRYSTAL AND AMORPHOUS SILICON

被引：43

|

作者：

LEE, DH ^{[1
]}

HART, RR ^{[1
]}

KIEWIT, DA ^{[1
]}

MARSH, OJ ^{[1
]}

机构：

[1] HUGHES AIRCRAFT CO,RES LABS,MALIBU,CA 90265

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1973年 / 15卷 / 02期

关键词：

D O I：

10.1002/pssa.2210150235

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：645 / 651

页数：7

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