FUNDAMENTAL-ASPECTS OF ELECTRON-BEAM LITHOGRAPHY

被引：0

|

作者：

VENKATESH, GM ^{[1
]}

CROSBY, V ^{[1
]}

NARULA, A ^{[1
]}

CHIEN, JCW ^{[1
]}

HSU, SL ^{[1
]}

机构：

[1] UNIV MASSACHUSETTS,DEPT POLYMER SCI & ENGN,AMHERST,MA 01003

来源：

ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1981年 / 182卷 / AUG期

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中图分类号：

O6 [化学];

学科分类号：

0703 ;

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页码：72 / POLY

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