FUNDAMENTALS OF CHEMICAL VAPOR-DEPOSITION

被引：162

|

作者：

BRYANT, WA ^{[1
]}

机构：

[1] WESTINGHOUSE RES & DEV CTR, PITTSBURGH, PA 15222 USA

来源：

JOURNAL OF MATERIALS SCIENCE | 1977年 / 12卷 / 07期

关键词：

D O I：

10.1007/BF00540843

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

收藏

页码：1285 / 1306

页数：22

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