A MICROALIGNMENT SYSTEM FOR HIGH-PRECISION POSITIONING OF COLLIMATING PINHOLES

被引:2
|
作者
FISCHER, W [1 ]
RANDO, N [1 ]
PEACOCK, A [1 ]
VENN, R [1 ]
机构
[1] CAMBRIDGE MICROFAB LTD,CAMBRIDGE,ENGLAND
来源
REVIEW OF SCIENTIFIC INSTRUMENTS | 1994年 / 65卷 / 03期
关键词
D O I
10.1063/1.1145124
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
A complete micropositioning unit based on high precision, manually controlled X-Y-Z translators, related metrology system, and sighting microscope is described. It has been specifically developed for the alignment of collimating pinholes (5-10 mum diam) on cryogenic x-ray detectors, 10-50 mum in size, deposited both on transparent and opaque substrates. The main characteristics of this flexible and convenient system are the capability to handle a complete test fixture ready for further measurements at cryogenic temperature, coupled with the possibility to verify the precision attained. Such microalignment equipment will find application in optical/UV/x-ray photon counting experiments, whenever a highly collimated illumination is required or in any test involving precision positioning of small experimental units onto microdevices or detectors.
引用
收藏
页码:603 / 607
页数:5
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