THERMAL-OXIDATION OF BETA-TA BELOW 500-DEGREES-C

被引：12

|

作者：

SATO, S

INOUE, T

SASAKI, H

机构：

来源：

THIN SOLID FILMS | 1981年 / 86卷 / 01期

关键词：

D O I：

10.1016/0040-6090(81)90154-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：21 / 30

页数：10

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