LASER ALLOYING OF AUTE CONTACTS ON GAAS

被引：3

|

作者：

WUYTS, K ^{[1
]}

VANGRUNDERBEEK, J ^{[1
]}

SILVERANS, RE ^{[1
]}

VANHOVE, M ^{[1
]}

VANROSSUM, M ^{[1
]}

机构：

[1] INTERUNIV MICROELECTR CTR,B-3030 LEUVEN,BELGIUM

来源：

APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期

关键词：

D O I：

10.1016/0169-4332(89)90945-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

收藏

页码：511 / 519

页数：9

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