LASER ALLOYING OF AUTE CONTACTS ON GAAS

被引：3
|
作者：
WUYTS, K [1 ]
VANGRUNDERBEEK, J [1 ]
SILVERANS, RE [1 ]
VANHOVE, M [1 ]
VANROSSUM, M [1 ]
机构：
[1] INTERUNIV MICROELECTR CTR,B-3030 LEUVEN,BELGIUM
来源：
APPLIED SURFACE SCIENCE | 1989年 / 36卷 / 1-4期
关键词：
D O I：
10.1016/0169-4332(89)90945-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：511 / 519
页数：9
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