ION-IMPLANTATION OF OPTICAL-DEVICES

被引:8
|
作者
BUCHAL, C
机构
[1] Institut für Schicht- und Ionentechnik, Forschungszentrum Jülich (KFA)
关键词
D O I
10.1016/0168-583X(92)96106-9
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The use of accelerators for research and technology in the field of optical materials is outlined. We stress the application of ion beams of 1 to 10 MeV energy for optical waveguide formation and for waveguide doping. This includes ion beam mixing and doping of semiconductor heterostructures, doping of glass guides with laser active ions, guide formation in ceramic single crystals by MeV He implantation and the associated index modification by electronic and nuclear energy transfer. Recent results of RBS/channeling/PIXE studies of dopant lattice locations are also discussed.
引用
收藏
页码:355 / 360
页数:6
相关论文
共 50 条
  • [21] GAAS HALL DEVICES PRODUCED BY LOCAL ION-IMPLANTATION
    PETTENPAUL, E
    HUBER, J
    WEIDLICH, H
    FLOSSMANN, W
    VONBORCKE, U
    SOLID-STATE ELECTRONICS, 1981, 24 (08) : 781 - 786
  • [22] CATHODIC ARC ION-IMPLANTATION FOR SEMICONDUCTOR-DEVICES
    XIA, Z
    CHAN, C
    MEASSICK, S
    PURSER, R
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (05): : 1999 - 2003
  • [23] The role of ion-implantation in the realization of spintronic devices in diamond
    Kalish, Rafi
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2012, 272 : 42 - 48
  • [24] MOLECULAR OPTICAL-DEVICES
    POTEMBER, RS
    HOFFMAN, RC
    MURPHY, RA
    STETYICK, KA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 196 : 70 - INOR
  • [25] ION-IMPLANTATION
    MACRAE, AU
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1977, 22 (03): : 306 - 307
  • [26] ION-IMPLANTATION
    WEYER, G
    HYPERFINE INTERACTIONS, 1986, 27 (1-4): : 249 - 262
  • [27] ION-IMPLANTATION
    DEARNALEY, G
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 1974, 29 (174): : 401 - 406
  • [28] ION-IMPLANTATION
    LANGOUCHE, G
    HYPERFINE INTERACTIONS, 1991, 68 (1-4): : 95 - 106
  • [29] ION-IMPLANTATION
    HERMAN, H
    MANUFACTURING ENGINEERING, 1985, 94 (05): : 11 - 11
  • [30] ION-IMPLANTATION
    PERLOFF, DS
    SOLID STATE TECHNOLOGY, 1985, 28 (02) : 127 - 127