MICROSTRUCTURING OF PHOTOMASKS BY A NON-REACTIVE RADIO-FREQUENCY ION ETCHING

被引：3
|
作者：
SPANGENBERG, B [1 ]
GORANCHEV, BG [1 ]
ORLINOV, VI [1 ]
JELEV, JG [1 ]
机构：
[1] INST SEMICOND COMPONENTS,BOTEVGRAD,BULGARIA
来源：
THIN SOLID FILMS | 1982年 / 87卷 / 04期
关键词：
D O I：
10.1016/0040-6090(82)90285-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：313 / 322
页数：10
相关论文
共 50 条
  • [41] Compact radio-frequency resonator for cryogenic ion traps
    Gandolfi, D.
    Niedermayr, M.
    Kumph, M.
    Brownnutt, M.
    Blatt, R.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (08):
  • [42] Better Prediction of the Performance of a Radio-frequency Ion Thruster
    Quang T. D. Pham
    Jichul Shin
    Journal of the Korean Physical Society, 2020, 76 : 137 - 144
  • [43] Better Prediction of the Performance of a Radio-frequency Ion Thruster
    Pham, Quang T. D.
    Shin, Jichul
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2020, 76 (02) : 137 - 144
  • [44] IMPROVED RADIO-FREQUENCY HEAVY-ION SOURCE
    MA, MH
    YAO, W
    PAI, KP
    CHANG, TH
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1979, 44 (1-4): : 207 - 211
  • [45] CHARACTERISTICS OF AN ION BEAM FROM A RADIO-FREQUENCY SOURCE
    PETROV, VI
    SOVIET PHYSICS-TECHNICAL PHYSICS, 1961, 6 (03): : 249 - &
  • [46] Development of the Radio-Frequency Ion Thruster on Atmospheric Gases
    Kozhevnikov V.V.
    Smirnov P.E.
    Suvorov M.O.
    Khartov S.A.
    Thermal Engineering, 2017, 64 (13) : 952 - 958
  • [47] OPERATIONAL CHARACTERISTICS OF A RADIO-FREQUENCY ION-SOURCE
    KHAN, MY
    KHAN, SA
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1972, 5 (01): : 76 - +
  • [48] On the Cost of Ion Production in Radio-Frequency Ion Thrusters and Technological Ion Sources
    Abgaryan V.K.
    Kruglov K.I.
    Mogulkin A.I.
    Obukhov V.A.
    Riaby V.A.
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2017, 11 (6) : 1239 - 1245
  • [49] Optimizing the Design Geometry of Radio-Frequency Ion Thrusters and Ion Sources
    Abgaryan, V. K.
    Melnikov, A. V.
    Kupreeva, A. Yu.
    Peisakhovich, O. D.
    JOURNAL OF SURFACE INVESTIGATION, 2023, 17 (01): : 135 - 143
  • [50] Simple radio-frequency power source for ion guides and ion traps
    Jones, RM
    Gerlich, D
    Anderson, SL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1997, 68 (09): : 3357 - 3362
12345