IMPURITY SEGREGATION CORRELATED WITH MICROSTRUCTURE IN BURIED OXIDE SILICON-ON-INSULATOR STRUCTURES

被引：1
|
作者：
PUGA, MM
BURK, DE
机构：
来源：
APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 02期
关键词：
D O I：
10.1063/1.100387
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：122 / 124
页数：3
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