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IMPURITY SEGREGATION CORRELATED WITH MICROSTRUCTURE IN BURIED OXIDE SILICON-ON-INSULATOR STRUCTURES
被引:1
|
作者
:
PUGA, MM
论文数:
0
引用数:
0
h-index:
0
PUGA, MM
BURK, DE
论文数:
0
引用数:
0
h-index:
0
BURK, DE
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1988年
/ 53卷
/ 02期
关键词
:
D O I
:
10.1063/1.100387
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:122 / 124
页数:3
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